Possible application of laser-induced backside dry etching technique for fabrication of SERS substrate surfaces

► The capability of laser induced backside dry etching method is presented to create active substrates for surface enhanced Raman scattering. ► Nanostructures on a fused silica surface are created by LIBDE. ► SERS activity is investigated on LIBDE created structures with silver coatings on them having different thicknesses. ► Near field properties of different rough surfaces is calculated by finite element method.