Growth feature of ionic nitrogen doped CNx bilayer films with Ti and TiN interlayer by pulse cathode arc discharge

Growth feature of ionic nitrogen doped CNx bilayer films with Ti and TiN interlayer by pulse cathode arc discharge

Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Applied Surface Science - Volume 361, 15 January 2016, Pages 169-176

Bing Zhou, Zhubo Liu, D.G. Piliptsou, A.V. Rogachev, Shengwang Yu, Yanxia Wu, Bin Tang, A.S. Rudenkov,