Influence of electric field on laser damage properties of DLC films by unbalanced magnetron sputtering

▸ Relationship between electric field and laser damage were studied. ▸ Laser damage properties of DLC films were investigated. ▸ The laser damage-resistance may be improved by optimizing the electric filed. ▸ Films with higher electric field are most likely first to be damaged. ▸ Lower electric filed intensity in DLC, smaller cracked spots.