Thermodynamics of the formation of face-centered-cubic silicon nanocrystals in silicon-rich SiC thin films annealed using rapid thermal annealing

▸ Fcc-structured Si-NCs were formed in the surface layer of SiC-matrix thin film. ▸ Nucleation of fcc-structured Si-NCs was demonstrated using thermodynamics. ▸ Gibbs free energy and surface energy determined the structure of Si-NC nuclei. ▸ Nano-induced pressure was helpful for the nucleation of fcc-structured Si-NCs. ▸ Formation of fcc-structured Si-NCs was unrelated to the effect of carbon-doping.