Study of spatial homogeneity and nitridation of an Al nanopattern template with spectroscopic photoemission and low energy electron microscopy

► Spatial homogeneity and nitridation of a nanopattern template were studied by SPELEEM. ► The template exhibited a global inhomogeneity concerning the individual nanopatterns. ► The nanopatterns were diminished, more corrugated and faceted after nitridation. ► The nitridated Al nanodots were structurally ordered but differently orientated. ► The nitridation removed the fluorocarbon sidewalls of the nanopatterns.