کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
5354253 | 1503684 | 2013 | 5 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Degradation and modification of stainless-steel surface using Cl2/Ar inductively coupled plasma
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
شیمی
شیمی تئوریک و عملی
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: Degradation and modification of stainless-steel surface using Cl2/Ar inductively coupled plasma Degradation and modification of stainless-steel surface using Cl2/Ar inductively coupled plasma](/preview/png/5354253.png)
چکیده انگلیسی
The investigations of stainless steel (SS) etching behavior in the Cl2/Ar inductively coupled plasma as well as the etched surface characteristics were carried out. It was found that an increase in Ar fraction in the Cl2/Ar plasma from 0 to 100% at fixed gas pressure, input power and bias power results in decreasing both etching (degradation) rate of the SS surface (41.3-1.5Â nm/min) and mean SS surface roughness (84-20Â nm). Plasma diagnostics by Langmuir probes and 0-dimensional plasma modeling provided the data on plasma parameters, steady-state densities and fluxes of active species on the etched surface. It was shown that the maximum changes in mean roughness as well as in both polar and dispersive components of free surface energy correspond to a maximum value of Cl atom flux/ion flux ratio. Also, the linear correlation between free surface energy and mean roughness was obtained.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Applied Surface Science - Volume 279, 15 August 2013, Pages 41-45
Journal: Applied Surface Science - Volume 279, 15 August 2013, Pages 41-45
نویسندگان
Hanbyeol Jang, Alexander Efremov, Sun Jin Yun, Geun Young Yeom, Kyoung Bo Kim, Kwang-Ho Kwon,