Effect of Br+6 ions on the structural, morphological and luminescent properties of ZnO/Si thin films

- UV and blue-green light emitting ZnO films were synthesized by RF magnetron sputtering.
- ZnO films were irradiated by 80 meV Br+6 ions at various ion fluencies.
- O1s XPS peaks consist of two components: O1 (ZnO) and O3 (adsorbed species).
- A sharp UV band is observed in pristine films.
- A blue-green defect emission from the ZnO irradiated at 5 × 1013 fluencies.