Ultrafast laser parallel microprocessing using high uniformity binary Dammann grating generated beam array

► We demonstrated ultrashort pulse laser parallel processing using diffractive beam-array generated by binary Dammann gratings. ► The beam-array machined holes had high uniformity (hole diameter variation <4%) by slightly defocusing the 0-th order. ► Parallel surface patterning of ITO with periodic structures was demonstrated using the beam array.