Electron scattering at surfaces and grain boundaries in thin Au films

► We measured the resistivity of gold films varying film thickness and grain size. ► We examine resistivity data using theories of electron-grain boundary scattering. ► Mayadas's theory describes the same resistivity data using different parameters. ► Mayadas's theory leads to a sizable increase of resistivity in small grained films. ► Palasantzas's theory leads to a film resistivity that is identical to the bulk.