Characterization of transparent conductive delafossite-CuCr1−xO2 films

► The CuCr1−xO2 films with x < 0.25 are successfully deposited by low-cost sol-gel processing. ► Pure CuCrO2 phase exists in the CuCr1−xO2 films below x ≤ 0.20. ► The chemical states of Cu and Cr in pure CuCrO2 phase are +1 and +3 valence. ► The stoichiometry in CuCr1−xO2 films enhances the electrical conductivity of the films.