Capacitive humidity-sensing properties of Zn2SiO4 film grown on silicon nanoporous pillar array

► A Zn2SiO4 film was grown on silicon nanoporous pillar array (Si-NPA) for humidity detection. ► Zn2SiO4/Si-NPA humidity sensor showed high sensitivity, quick response and slight hysteresis. ► Zn2SiO4/Si-NPA might be a promising material for fabricating practical humidity sensors.