Room-temperature preparation and properties of cadmium sulfide thin films by ion-beam sputtering deposition

► CdS thin film is prepared by a dry and in situ preparation by ion-beam sputtering at room temperature. ► A mixed cubic and hexagonal wurtzite structure and a smooth surface morphology. ► High absorption in the visible spectrum and of n-type conductivity. ► After annealed at 100 °C, optimized properties can be found.