Enhanced uniformity and durability of antisticking layer in imprinting stamps

► A fluorinated self-assembled monolayer (SAM) is used as an antisticking layer in NIL. ► We formed the antisticking layer with the 0.5 nm uniformity via stamp tilt and rotation. ► To enhance durability, we treated the stamp surface before and after treatment. ► We identified that the durability of antisticking layer was dramatically improved.