The structure, surface topography and mechanical properties of Si-C-N films fabricated by RF and DC magnetron sputtering

► The Si-N film coating on Co-Cr alloy as biomechanical coating was put forward. ► The Si-N film/UHMWPE sliding pair displays super-low friction coefficient, the friction curve shows the downtrend. ► Micro-scratch results showed that DLC and Si-N films possess the high-quality interfacial bonding in the film/substrate. ► The nano-indentation results that DLC and Si-N film enhances the hardness of the Co-Cr alloy to seven times and three times. ► DLC film indentation hardness values in the range of 60 GPa (super hard region).