Synthesis and properties control of fluorinated organic-inorganic hybrid films

► Three layered fluorinated organic-inorganic hybrid films were synthesized. ► Surface wettability of the films was governed by fluorocarbon groups of the outermost layer. ► The most of tetramethoxysilane added were arranged to the bottom layer to improve the thickness. ► The increase in tetramethoxysilane content had a slight effect on surface wettability.