Microstructure and dielectric properties of (Ba0.6Sr0.4)TiO3 thin films grown on super smooth glazed-Al2O3 ceramics substrate

► Modified Al2O3 ceramic substrate replaces single-crystal LaAlO3 for BST films. ► The almost equivalent dielectric properties are observed on both substrates. ► Modified substrate is obtained by coating a layer of high temperature glaze. ► Glaze decreases the surface roughness to RMS <0.3 nm.