Characteristics of the electromagnetic interference shielding effectiveness of Al-doped ZnO thin films deposited by atomic layer deposition

► Al-doped ZnO thin film. ► Modified pulse sequence atomic layer deposition. ► Most effective pulse sequence of Al-doped ZnO thin films is DEZ/N2/TMA/N2/H2O/N2. ► 6.5 dB of EMI-SE with 131 nm thick Al-doped ZnO thin film.