Quantitative analysis of cathodoluminescence phenomena in InGaN/GaN QW by Monte Carlo method

► CL spectra from InGaN/GaN SQW on nanopyramid were analysed by Monte Carlo method. ► Influence of electron beam parameters to the evolution of CL spectra was assessed. ► The InGaN/GaN recombination ratio rapidly decreases with increasing beam energy Epe. ► The recombination in InGaN depends on diffusion length L in GaN and incidence angle. ► The recombination in InGaN reaches maximum at Epe in dependence on L.