Radio frequency plasma enhanced chemical vapor based ZnO thin film deposition on glass substrate: A novel approach towards antibacterial agent

► ZnO thin films are synthesized on borosilicate glass slides by PECVD method. ► The films are annealed at 450 °C in air for 1.5 h to improve crystallinity. ► The films exhibit excellent inhibition effect against E. coli and P. aeruginosa. ► The bactericidal activity is explained on the basis of diffusion of Zn2+ ions into bacteria cells.