Electroluminescence with micro-watt output from ultra-small sized Si quantum dots/amorphous SiO2 multilayers prepared by laser crystallization method

► Si QDs-based multilayers with ultra-small size (1.8 nm and 3.2 nm) are obtained by laser crystallization method. ► EL spectrum is dependent of the dot size and contains two sub-bands which are originated from the different mechanism. ► The emission efficiency is improved by controlling the dot size as small as 1.8 nm and μ-watt light emission is obtained.