Effect of gas flow ratio on the microstructure and mechanical properties of boron phosphide films prepared by reactive magnetron sputtering

► Boron phosphide films with cubic phase are obtained using radio frequency reactive magnetron sputtering technique at low temperature. ► The variation laws of microstructure and mechanical properties with the gas flow ratio increasing by RFRMS technique have been investigated. ► The results indicate that the BP film prepared at low gas flow ratio of 3/50 is optimal.