Structural and mechanical properties of multi-element (TiVCrZrHf)N coatings by reactive magnetron sputtering

► The N2 flow influences the structure and properties of (TiVCrZrHf)N coatings. ► The saturated nitride coatings reveal a columnar structure with FCC crystal phase. ► The coatings without external heating or bias can achieve a high hardness of 23.8 GPa.