(Ti,Al,Si,C)N nanocomposite coatings synthesized by plasma-enhanced magnetron sputtering

► The columnar crystals are restrained by C incorporation and a typical non-columnar growth mode is obtained. ► The (Ti,Ai,Si,C)N hard coatings has a super higher hardness (about 41 GPa) than that of Ti-Al-Si-N hard coatings. ► The (Ti,Ai,Si,C)N coatings have a very lower friction coefficient (about 0.18) than that of Ti-Al-Si-N hard coatings (about 0.6) and show a better wear state after friction.