The effect of laser patterning parameters on fluorine-doped tin oxide films deposited on glass substrates

► We fabricate FTO film electrodes by a UV laser processing system. ► The patterned structures provide the electrical isolation for various touch screens. ► Increasing overlapping rate of laser spot can obtain an excellent machined quality. ► All sheet resistance near the isolated line edge are larger than the original ones. ► The sheet resistance increases with increasing laser spot overlapping area.