Experimental and theoretical evaluation of wettability on micro/nano hierarchically engineered surfaces based on robust micro-post-arrayed- and highly ordered nano-rippled-structures

► A geometrically regular and stable micro/nano hierarchical surface was proposed. ► The hierarchical surface was demonstrated simply using AAO and MEMS technologies. ► The proposed approach can improve wettability of high-density micro-roughened surface. ► Superhydrophobic robustness of low-density micro-roughened surface was also enhanced.