An undercutting model of atomic oxygen for multilayer silica/alumina films fabricated by plasma immersion implantation and deposition on polyimide

► The undercutting model of polymer covered with protective film induced by AO was defined. ► The AO erosion mechanism of polyimide has been investigated using a ground-based AO simulator and Monte Carlo model. ► AO erosion predictions at two neighborhood cracks is first studied by Monte Carlo model. ► Multilayer silica/alumina films were created by plasma immersion implantation and deposition for protection against AO.