Study on nanocomposite Ti-Al-Si-Cu-N films with various Si contents deposited by cathodic vacuum arc ion plating

► XRD peaks show a tendency of decreasing intensity with increasing Si content. ► Ti-Al-Si-Cu-N films present different microstructure with increasing Si content. ► Films with 6 at.% Si content obtain the highest hardness, elastic modulus and H3/E2. ► The wear rate decreases with an increase in hardness.