Dual-scale rough multifunctional superhydrophobic ITO coatings prepared by air annealing of sputtered indium-tin alloy thin films

► Sputtered indium-tin coatings were annealed in air to generate superhydrophobic surfaces. ► The coatings also showed multifunctional properties, viz., semi-transparency, conductivity and photoluminescence. ► Dual scale roughness of the samples was detected using FESEM, rendering the drops to be in Cassie wetting state. ► Chemical nature and structure of the coatings was examined by XRD, XPS and micro-Raman analyses. ► The other properties were examined by absorption spectra, sheet resistance and PL spectra measurements.