High-resolution XPS spectromicroscopy study of micro-patterned gold-tin surfaces

► Surface chemical-state analysis of gold-tin micro-patterns obtained after partial delamination of photo-resist during tin deposition. ► Heterogeneity of gold-tin surface chemistry (metal, oxide and alloyed, eutectic phase) over 10 μm. ► Practical use of high-resolution core level XPS spectromicroscopy (1 μm lateral resolution).