Structural and electrical properties of evaporated Fe thin films

► Evaporated Fe thin films in the 76-431 nm thickness range. ► The surface morphology, the structural and electrical properties are investigated. ► The effect of substrate (glass, Si), deposition rate and thickness are studied. ► Texture, grain size, strain and electrical resistivity depend on the substrate. ► Higher deposition rate induces droplets on the surface with greater density in Fe/Si.