The role of the substrate material type in formation of laser induced periodical surface structures on ZnO thin films

► LIPSS were produced by femtoseconds laser beam on ZnO films deposited by PLD. ► The nanostructures morphology depends on substrate material. ► The XRD measurements demonstrate the polycrystalline structure of the ZnO LIPSS. ► Fused silica and c-Al2O3 substrates are the most suitable for producing ZnO ripples.