Nanosecond laser ablation processes in aluminum-doped zinc-oxide for photovoltaic devices

► A study of the ablation of AZO thin films deposited at different temperature conditions with nanosecond UV laser light for photovoltaic devices has been performed. ► The ablation threshold of AZO thin films was measured and related with the absorption coefficient of the films at the laser wavelength, showing a direct correspondence. ► A change in the material structure in the areas closest to the edges of laser grooves made in samples deposited at temperatures below 100 °C was observed and studied.