Crystallization of amorphous Si3N4 and superhardness effect in HfC/Si3N4 nanomultilayers

► Si3N4 does not react with C2H2 in the sputtering condition. ► Transitional metal carbide (HfC) could force as-deposited amorphous materials (Si3N4) to crystallize as nitride due to “template effect” in multilayer growth. ► The carbide-based HfC/Si3N4 nanomultilayer can also exhibit coherent growth and get superhardness effect.