Surface modification of hard alloy by Y ion implantation under different atmosphere

► Rare-earth Y was implanted into hard alloy surface by MEVVA technology under different atmosphere. ► New phases of C, YC2, Y2O3, and WN appear in the implanted sample surface. ► Nnitrogen atmosphere can farther promote the performance of the implanted sample surface. ► Surface modification is the comprehensive action result of all involved aspects. ► Introducing atmosphere factor may develop the using scope of ion implantation in certain degree.