Femtosecond laser-induced subwavelength ripples formed by asymmetrical grating splitting

The formation process and mechanism of subwavelength ripples were studied upon irradiation of ZnO by a femtosecond laser (800 nm, 50 fs, 1 kHz). An abnormally asymmetrical grating-splitting phenomenon was discovered. At relatively high laser fluences (F = 0.51-0.63 J/cm2), near-wavelength ripples were split asymmetrically to create subwavelength laser-induced periodic surface structures (LIPSS) with dual gaps (∼230 nm and ∼430 nm) on the primary grooves. At relatively low laser fluences (F = 0.4-0.45 J/cm2), near-wavelength ripples were split symmetrically, leading to the formation of uniform subwavelength structures with a period of ∼340 nm. The splitting phenomena are related to the varying laser beam dose induced by the overlapping during line scanning. The two grating-splitting types further imply that the dominated mechanism for LIPSS formation may be changed under different processing conditions.