کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
5356593 | 1503611 | 2015 | 29 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Further improving the mechanical and tribological properties of low content Ti-doped DLC film by W incorporating
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
شیمی
شیمی تئوریک و عملی
پیش نمایش صفحه اول مقاله
چکیده انگلیسی
W/Ti-doped diamond-like carbon (DLC) films were fabricated on Si substrates by co-sputtering W and Ti targets in methane and argon mixture atmosphere. The composition and the microstructure, internal stress, mechanical and tribological properties of the films were measured by X-ray photoelectron spectroscopy (XPS), high-resolution transmission electron microscopy (HRTEM), Raman spectra, BGS 6341 type film stress tester, nano-indentor and reciprocating ball-on-disc tester, respectively. The results indicated all films showed the amorphous structural characteristics and a constant thickness value of â¼600 nm (195 ± 15 nm Ti interlayer was designed in order to minimize the influence of Ti interlayer), and the Ti content increased from 0 to 34.5% as the W target current increased from 0 A to 14 A. As the W concentration increased from 0 to 2.6 at.%, the hardness increased to 12.7 GPa and the internal stress maintained at a low value and almost no change. Meanwhile, the friction coefficient and wear rate showed the lowest value (0.023 and 1.2 Ã 10â8 mm3/N m, respectively). With the W content increased to 34.5 at.% further, the internal stress, friction coefficient and wear rate of film are dramatically increased.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Applied Surface Science - Volume 353, 30 October 2015, Pages 522-529
Journal: Applied Surface Science - Volume 353, 30 October 2015, Pages 522-529
نویسندگان
Li Qiang, Kaixiong Gao, Lifang Zhang, Jian Wang, Bin Zhang, Junyan Zhang,