Microstructure, optical and electrical properties of Al-doped ZnO films grown by MOCVD

► Al-doped ZnO films were grown on quartz substrates by MOCVD. ► The preferred orientation of ZnO films decreased with the increase of Al content. ► Decomposition products of TMA bringing down the surface activity of ZnO grains. ► UV emission peak initially red-shifted and then blue-shifted as increasing Al content. ► Low electrical resistivity of Al-doped ZnO films was obtained.