Atomic force microscopy based repeatable surface nanomachining for nanochannels on silicon substrates

► A diamond tip is employed for AFM based surface nanomachining on silicon. ► Nanochannels are produced at different user-control parameter settings. ► Scratching number up to 5 is conducted to investigate the correlation. ► The dimensions of nanochannels are analyzed using linear and logarithmic fits. ► Current results can be used for reliable predicting the fabrication of nanochannels.