Improvement of electrical and optical properties of molybdenum doped zinc oxide films by introducing hydrogen

► Hydrogen and molybdenum co-doped ZnO TCO films were deposited. ► The HMZO films with low resistivity and high transmittance from 400 to 1100 nm. ► Crater-like surface morphology was obtained after etching by diluted HCl. ► The etched HMZO film with root-mean-square roughness of 46.5 nm.