Fabrication and reflection properties of silicon nanopillars by cesium chloride self-assembly and dry etching

► We have fabricated CsCl nanoislands with average diameter ranging from 50 nm to 1 μm. ► Different nanopillars have been fabricated by CsCl self-assembly and dry etching. ► We can make nanopillars with different height, average diameter and morphology. ► The nanopillars with 180 nm diameter and 1 μm height reduce reflectivity to below 5%.