Implications of alkaline solutions-induced etching on optical and minority carrier lifetime features of monocrystalline silicon

► Three alkaline solutions: NaOH, KOH and TMAH are used to form pyramidal structure on silicon surface wafer. ► The apex angle of the formed pyramids varies between 75° and 82°. ► The heights and bases range from 230 nm to 30 μm. ► The photoconductivity enhancement is related to pyramidal sizes and reflectivity behavior ► The QSSPC measurement reveals an apparent increase in the minority carrier lifetime.