Effects of rare earth and tantalum on graphite-like carbon coatings

The graphite-like carbon (GLC) coating with low friction and good wear resistance is appreciable to make further improvement. Ce, Y and Ta are doped into GLC by using mosaic in the target of magnetron sputtering process. The result shows that yttrium composed in chromium interlayer can increase the bonding strength and refine the microstructure of the GLC coating. For the surface layer of GLC, incorporation of Ta improves wear resistance and deposition rate, in the mean time the friction coefficient is decreased. As the modifications of interlayer and top layer are composed together to form complex GLC coating, the specific wear rate is reduced and the hardness, bonding strength and anti corrosion behavior are improved.