Physical properties of polycrystalline Cr-doped SnO2 films grown on glasses using reactive dc magnetron co-sputtering technique

▶ Cr-doped SnO2 films were fabricated on glass substrates using dc magnetron co-sputtering technique. ▶ The valence of Cr doped in SnO2 films is determined to be 3+ by XPS measurement. ▶ The electrical, optical and magnetic properties of the co-sputtered films were found to be strongly affected by Cr doping. ▶ The co-sputtered Cr-doped SnO2 films exhibit paramagnetic characteristics from room temperature down to 25 K.