Composition, microstructure, and properties of CrNx films deposited using medium frequency magnetron sputtering

▶ CrNx films with excellent mechanical and tribological properties were deposited using medium frequency magnetron sputtering with different N2 contents. ▶ The phases in the as-deposited CrNx films change from Cr(N) + Cr2N to single-phase Cr2N, and then Cr2N + CrN to single-phase CrN as a function of N2 content. ▶ The surface morphologies strongly depend on the N2 content and the as-deposited CrNx films exhibit typical columnar structure. ▶ Cr2N films show higher hardness than CrN films, whereas CrN films exhibit lower friction coefficient.