Well-ordered arranging of Ag nanoparticles in SiO2/Si by ion implantation

► Well-ordered arrangements of Ag nanoparticles have been observed. ► A δ-layer of tiny Ag nanoparticles was aligned along the SiO2/Si interface. ► A two-dimensional array of Ag nanoparticles of 25-40 nm was also formed. ► The Ag nanoparticles in SiO2 were quite stable against oxidation and sulfidation.