Ultrashort pulse laser patterning of indium tin oxide thin films on glass by uniform diffractive beam patterns

► We demonstrated ultrashort pulse laser parallel processing of ITO thin film using up to 25 diffractive beams. ► The diffractive multiple beams generated by a spatial light modulator had high uniformity (the energy variation <9%) by avoiding symmetrical geometry design. ► By synchronizing a scanning galvanometer, the processing demonstrated high flexibility to generate various surface patterns.