A comparative evaluation of surface morphology, cohesive and adhesive properties of one-step and two-step thermal deposited chromium thin films on glass substrates

► The two-step thermal deposition of chromium thin films followed by O2 plasma treatment after the first deposition improved adhesion and cohesion of a film/substrate composite as compared with typical thin film deposition process. ► The cohesive failure of the multilayered chromium film influenced by more contact-wear-resistant surface morphology increased from 81 ± 8 mN to 165 ± 10 mN. ► Adhesion to the substrate was improved and critical adhesive loads were increased from 198 ± 5 mN to 221 ± 5 mN with less eruption of the film due to multilayer boundaries.