On-chip nanostructuring and impedance trimming of transparent and flexible ITO electrodes by laser induced coherent sub-20Â nm cuts

⿢A novel method to make sub-20 nm nanopatterning in ITO thin films by laser writing.⿢A novel way to functionalize ITO bio-electrodes to yield near-field polarizing feature.⿢A basic characterization of ITO electrodes was performed by impedance spectroscopy.⿢Presentation of simulations and possible theoretical approaches to explain the results.