Thermal etching of SiC

► Defects in SiC such as twins and stacking faults were observed using an in-lens SEM. Usually TEM is necessary to observe these defects. ► Thermal etching of SiC starts at lower temperatures than previously reported. ► Decomposition of SiC starts at lower temperatures than previously reported. ► Thermal etching is suggested as an alternative polishing method for SiC. ► 3D nano-structures develop on SiC due to decomposition.