کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
5357396 1388218 2012 6 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Chemical and microstructural characterization of rf-sputtered BaTiO3 nano-capacitors with Ni electrodes
موضوعات مرتبط
مهندسی و علوم پایه شیمی شیمی تئوریک و عملی
پیش نمایش صفحه اول مقاله
Chemical and microstructural characterization of rf-sputtered BaTiO3 nano-capacitors with Ni electrodes
چکیده انگلیسی
► Sputter deposited BaTiO3 nano-capacitors ∼100 nm thick were characterized. ► AFM and SEM confirmed the films to be smooth and conformal with no macro-defects such as pores or cracks. ► TEM and XRD indicate the films were either amorphous or nanocrystalline. ► XPS showed the films had excess oxygen and Ba:Ti ratios ranging from 0.78 to 1.1. ► No correlation between the chemical/microstructural features and dielectric properties (permittivity up to ∼1000 and losses below 0.1).
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Applied Surface Science - Volume 258, Issue 15, 15 May 2012, Pages 5599-5604
نویسندگان
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